Quantum Engineering
Diamond quantum sensors for mapping current density in microelectronic interconnects
NV-centre magnetometry workflow for non-destructive current-density mapping in advanced interconnect test structures.
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Quantum Engineering
P. Nair, A. Hosseini, G. Lindström
NV-centre magnetometry workflow for non-destructive current-density mapping in advanced interconnect test structures.
Full archive DOI prefix: doi.org/10.47912/materia. Supplementary materials: contact technical support.